With our HED thermo-con series, the temperature of chemicals and high-purity media can be controlled directly.
Direct temperature control of chemicals with the SMC thermos-con ensures temperature stability of +/- 0.1° Celsius. The part which are in contact with the chemicals are made of chemical resistant plastic PFA, which prevents contamination from metal ion leaching.
A compact design and low weight are the result of the specially developed heat exchanger, which we have specially adapted to the shape of the Peltier elements.
A Peltier element is an electrothermal converter that generates either a temperature difference when current flows through it or a current flow when there is a temperature difference. Peltier elements are suitable for cooling and for heating (with current direction reversal).
The biggest advantages of Peltier elements are their small size and light weight, as well as enabling fast switching and precise temperature control.
The Peltier effect is based on the contact of two semiconductors whose conduction bands have different energy levels. With increasing current, the efficiency decreases, with good supply and dissipation of heat, it increases.
Applications of our thermo-con series HED are mainly in the semiconductor industry, for example in cleaning devices, coating systems and wet etching systems. But chemicals tanks can also be tempered with it.
In the semiconductor industry in particular, the requirements for stable temperatures in chemical processes are becoming increasingly demanding. The structures, which are constantly becoming smaller, require maximum purity and precise processes.
Conductive molecules, i.e. metals, must not get onto the wafers (thin silicon discs that are processed into microchips). To do this, all the media required to process the wafer must be fed into UHP (Ultra High Purity) systems. Since even the smallest traces of metal in the thin tracks cause short circuits, these fine structures are manufactured in clean rooms.
Examples of media hat can be tempered directly using the SMC thermos-con series HED are:
The operating temperature range for the media mentioned is between 10 and 60° Celsius.
Would you like to find out more about our HED series thermo-controller and its possible applications?
Get in touch with us – our team will be happy to answer your questions and work out solutions that are precisely tailored to your needs.
SMC ionizers of the IZS and IZT series protect electronic components such as chips in the semiconductor industry during production against electrostatic charging and the resulting defects. To do this, they capture and neutralize the electrostatic charge by producing positively and negatively charged ions and emitting them to the respective workpiece.
Our IZS series (IZS40/41/42) are all-in-one devices with a height of approx. 10 cm: ionization, electronics and high-voltage units are all in one device.
Dual-AC ionizers (IZS42) reduce the potential amplitude on the workpiece. The simultaneous discharge of positive and negative ions ensures that both reach the workpiece evenly and thus the potential amplitude on the workpiece is reduced.
The IZS41 dissipates static electricity very quickly due the optional feedback sensor. The sensor detects the electrostatic charge of the object to be discharged, measures the charging voltage, and then emits ions of reverse polarity.
Our standard version IZS40 ionizer is very easy to control by just switching on the ionizer. The discharge time is 3.2 seconds (41% faster) when installed at long distances (1,000 mm).
In the IZT series, the ionization bar can be constructed separately from the electronic and high-voltage unit. The ionizing bar has a height of approx. 37 mm and is therefore well suited for narrow, built-in, and space-limited places in the system.
With this design, electromagnetic particles that can result from the electronic and high-voltage unit can also be minimized. This series is available with IO-Link (manufacturer-independent fieldbus connection to the PLC).
Our IZT series is available in bar version (IZT40/41/42) and nozzle version (IZT43). Ionizers with nozzles remove dust and discharge static electricity, for example from plastic bottles, by means of a blow-out pulse.
IZT series ionizers are available in dual-AC (see IZS series for details) and AC (IZT41+43) versions. In the AC version, positive and negative ion layers alternately reach the workpiece, which ensures the maintenance of a constant offset voltage.
The controller allows easy monitoring of the individual ionizers and can be used to control a maximum of 4 ionizers, whereby a mixed connection of bar and nozzle is possible. It quickly detects ionizer faults and monitors contamination of the electrode needles. Compressed air is blown off on their surface, which minimizes contamination of the emitters.
Would you like to learn more about our ionizing devices of the IZS and IZT series and their areas of application?
Get in touch with us – our team will be happy to answer your questions.
We have developed our new JLV valve series (JLV20-Z07 and JLV30-Z11) especially for processing wafers in the semiconductor industry. If SMC valves of the JLV series are used, there is significantly less abrasion compared to similar valves and thus particles that could disrupt the production process and damage the wafer.
A wafer is the raw material from which microchips for computers are created, and translates as “thin slice.” Microchips are getting smaller and better, and their circuits are extremely small. This is why production in the semiconductor industry requires the highest purity – even the smallest traces of metals can cause short circuits.
In the microchip manufacturing process, the on-off valve ensures that the fluid flow of the medium is switched on or off – for example, when a chemical is applied to a wafer. The process must be particularly clean so that no impurities (particles) get onto the wafer, as this could disrupt the production process and damage the wafer or even destroy parts of the wafer.
JLV series valves are equipped with a so-called “piston shutter”. It reduces the closing speed in the last third of the shut-off process and thus reduces the kinetic energy acting on the valve seat. Less kinetic energy means less abrasion and therefore fewer particles.
Since SMC JLV series valves generate particularly few particles during the on and off switching process, the output on the customer side is increased.
Want to learn more about our new particle-optimized JLV valves and their potential applications? Contact us – our team will be happy to answer your questions.